NTT has developed a technology that exploits the characteristics of GaAs and greatly improves the accuracy of sensors using MEMS vibrators. At the NTT Research & Development Forum 2016 (February 18-19, 2016, NTT Musashino Research and Development Center, Musashino, Tokyo, Japan ) On the demo.
The technology is helpful to improve the sensor accuracy of detecting the presence of small and small substances at the molecular level. The sensor uses tiny vibrators formed using MEMS technology. The surface of the vibrator is attached with a membrane that absorbs only specific substances. As the substance adsorbs and the weight of the vibrator increases, the natural frequency of the vibrator changes. The sensor detects this using this point. If it is not used at absolute zero, the thermal noise of the vibrator's material, etc., will affect the vibration, thus affecting the accuracy of the sensor.
NTT has taken the use of GaAs on MEMS vibrators to eliminate thermal noise. GaAs has photoelectric conversion characteristics. When light of a specific wavelength is irradiated, carriers (electrons and holes) are generated in the material. On the other hand, it also has piezoelectric characteristics, mechanical loading occurs when the mechanical deformation occurs.
NTT combines these two features. That is, a cycle is formed in which a carrier generated by light irradiation charges an electric field and mechanically deforms it. Specifically, irradiating the laser to the root of the MEMS vibrator generates a distortion that suppresses thermal noise.
In addition to the MEMS vibrator-type sensor, this technology can also be used as a method of controlling extremely small mechanical motions of MEMS and a method of implementing an optical-thermal-mechanical-electronic linkage circuit on a conductive chip. From now on in the basic research phase, while exploring applications, while practical.
MEMS sensor
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